Investigation on SiGe Selective Epitaxy for Source and Drain Engineering in 22 nm CMOS Technology Node and Beyond Guilei Wang

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Investigation on SiGe Selective Epitaxy for Source and Drain Engineering in 22 nm CMOS Technology Node and Beyond Guilei Wang Digital Instant Download

Author(s): Guilei Wang
ISBN(s): 9789811500459, 9789811500466, 9811500452, 9811500460
Edition: 1st ed. 2019
File Details: PDF, 6.36 MB
Year: 2019
Language: English
SKU: EB-10805846 Category: Tag: