Whole Angle MEMS Gyroscopes Challenges and Opportunities IEEE Press Series on Sensors 1st Edition by Doruk Senkal 1119441889 9781119441885

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ISBN 10: 1119441889
ISBN 13: 9781119441885
Author: Doruk Senkal

Presents the mathematical framework, technical language, and control systems know-how needed to design, develop, and instrument micro-scale whole-angle gyroscopes This comprehensive reference covers the technical fundamentals, mathematical framework, and common control strategies for degenerate mode gyroscopes, which are used in high-precision navigation applications. It explores various energy loss mechanisms and the effect of structural imperfections, along with requirements for continuous rate integrating gyroscope operation. It also provides information on the fabrication of MEMS whole-angle gyroscopes and the best methods of sustaining oscillations. Whole-Angle Gyroscopes: Challenges and Opportunities begins with a brief overview of the two main types of Coriolis Vibratory Gyroscopes (CVGs): non-degenerate mode gyroscopes and degenerate mode gyroscopes. It then introduces readers to the Foucault Pendulum analogy and a review of MEMS whole angle mode gyroscope development. Chapters cover: dynamics of whole-angle coriolis vibratory gyroscopes; fabrication of whole-angle coriolis vibratory gyroscopes; energy loss mechanisms of coriolis vibratory gyroscopes; and control strategies for whole-angle coriolis vibratory gyro- scopes. The book finishes with a chapter on conventionally machined micro-machined gyroscopes, followed by one on micro-wineglass gyroscopes. In addition, the book: Lowers barrier to entry for aspiring scientists and engineers by providing a solid understanding of the fundamentals and control strategies of degenerate mode gyroscopes Organizes mode-matched mechanical gyroscopes based on three classifications: wine-glass, ring/disk, and mass spring mechanical elements Includes case studies on conventionally micro-machined and 3-D micro-machined gyroscopes Whole-Angle Gyroscopes is an ideal book for researchers, scientists, engineers, and college/graduate students involved in the technology. It will also be of great benefit to engineers in control systems, MEMS production, electronics, and semi-conductors who work with inertial sensors.

Whole-Angle MEMS Gyroscopes: Challenges and Opportunities 1st Table of contents:

Part I: Fundamentals of Whole‐Angle Gyroscopes
1 Introduction
1.1 Types of Coriolis Vibratory Gyroscopes
1.2 Generalized CVG Errors
1.3 Overview
2 Dynamics
2.1 Introduction to Whole‐Angle Gyroscopes
2.2 Foucault Pendulum Analogy
2.3 Canonical Variables
2.4 Effect of Structural Imperfections
2.5 Challenges of Whole‐Angle Gyroscopes
3 Control Strategies
3.1 Quadrature and Coriolis Duality
3.2 Rate Gyroscope Mechanization
3.3 Whole‐Angle Mechanization
3.4 Conclusions
Part II: 2‐D Micro‐Machined Whole‐Angle Gyroscope Architectures
4 Overview of 2‐D Micro‐Machined Whole‐Angle Gyroscopes
4.1 2‐D Micro‐Machined Whole‐Angle Gyroscope Architectures
4.2 2‐D Micro‐Machining Processes
5 Example 2‐D Micro‐Machined Whole‐Angle Gyroscopes
5.1 A Distributed Mass MEMS Gyroscope – Toroidal Ring Gyroscope
5.2 A Lumped Mass MEMS Gyroscope – Dual Foucault Pendulum Gyroscope
Part III: 3‐D Micro‐Machined Whole‐Angle Gyroscope Architectures
6 Overview of 3‐D Shell Implementations
6.1 Macro‐scale Hemispherical Resonator Gyroscopes
6.2 3‐D Micro‐Shell Fabrication Processes
6.3 Transduction of 3‐D Micro‐Shell Resonators
7 Design and Fabrication of Micro‐glassblown Wineglass Resonators
7.1 Design of Micro‐Glassblown Wineglass Resonators
7.2 An Example Fabrication Process for Micro‐glassblown Wineglass Resonators
7.3 Characterization of Micro‐Glassblown Shells
8 Transduction of Micro‐Glassblown Wineglass Resonators
8.1 Assembled Electrodes
8.2 In‐plane Electrodes
8.3 Fabrication
8.4 Experimental Characterization
8.5 Out‐of‐plane Electrodes
8.6 Design
8.7 Fabrication
8.8 Experimental Characterization
9 Conclusions and Future Trends
9.1 Mechanical Trimming of Structural Imperfections
9.2 Self‐calibration
9.3 Integration and Packaging

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